Tungsten Hexafluoride (WF6) Supplier in Malaysia
- Also known as
- WF6
Tungsten hexafluoride supplier for semiconductor, thin-film and research buyers in Malaysia. Known by the formula WF6, it is a colourless specialty gas used as a tungsten precursor in chemical vapour deposition processes.
Electronic and technical grades are selected by purity, moisture, trace-metal limits and cylinder or valve requirements. Those details should come from the gas-handling and deposition process rather than from a general gas description.
Semiconductor fabrication uses WF6 to deposit tungsten for contacts, vias and interconnect structures. Research and specialised deposition programmes may request a technical or development grade against their own analytical and packaging specification.
Send the grade, purity and cylinder requirements, quantity and delivery location with your enquiry. Packing, documentation and commercial terms are confirmed with the quotation. Supply is subject to applicable requirements.

- CAS number
- 7783-82-6
- Formula
- WF6
- Appearance
- colourless gas, with a low-temperature condensed liquid form
WF6 grades and forms
We supply several forms to suit different formulating and dosing setups. If you need a size that is not listed, ask us.
| Grade | Form | Assay | Typical use | Packing |
|---|---|---|---|---|
| Electronic grade | compressed gas | tungsten CVD for semiconductor contact and interconnect deposition | Cylinder and valve specification confirmed with the quotation. | |
| Technical grade | compressed gas | industrial metal coating and research applications | Cylinder and valve specification confirmed with the quotation. |
How to buy WF6 from ChemTrade
Request a quote for WF6
Use the form below to request a quotation. You can also email sales@chemtrademalaysia.com or send us a message on WhatsApp.
Specifications
| Parameter | Value | Method |
|---|---|---|
| Chemical identity | tungsten hexafluoride, commonly abbreviated WF6 | — |
| Appearance | colourless gas, with a low-temperature condensed liquid form | — |
| Grade controls | purity, moisture, trace-metal limits, cylinder and valve requirements are confirmed against the requested electronic or technical grade | — |
WF6 applications
Safety and handling
Store cylinders upright in a cool, dry, well-ventilated area. Keep away from moisture, acids and incompatible materials. Supply is subject to applicable requirements.
Common questions about WF6
Which tungsten hexafluoride grades can be requested?
Electronic and technical grades can be requested. State the purity, moisture, trace-metal, cylinder and valve requirements for the intended CVD or research process.
What is tungsten hexafluoride used for in semiconductor manufacturing?
WF6 is the standard precursor gas for chemical vapour deposition of tungsten. It reacts with hydrogen or silane on a heated wafer surface to deposit a metallic tungsten film that fills contact holes and vias in integrated circuit fabrication.
How should tungsten hexafluoride be handled and stored?
Tungsten hexafluoride is supplied in pressurised cylinders and must be stored upright in a cool, dry, well-ventilated area. It reacts with moisture and requires appropriate gas-handling infrastructure.
What documentation is provided with WF6 orders?
Availability of certificate of analysis, safety data sheet and other technical documentation is confirmed with the quotation.
